Model No. |
SJ-411 |
SJ-412 |
Order No. |
mm |
178-580-11 |
178-580-12 |
178-582-11 |
178-582-12 |
inch/mm |
178-581-11 |
178-581-12 |
178-583-11 |
178-583-12 |
Measuring range |
X axis |
25 mm |
50 mm |
|
Z axis (detector) |
800 µm, 80 µm, 8 µm Up to 2,400 µm when using an optional stylus. |
Detector |
Detection method |
Differential inductance |
Resolution |
0.01 µm (800 µm range), 0.001 µm (80 µm range), 0.0001 µm (8 µm range) |
Stylus tip shape (Angle/Radius) |
60°/2 µm |
90°/5 µm |
60°/2 µm |
90°/5 µm |
Measuring force |
0.75 mN |
4 mN |
0.75 mN |
4 mN |
Radius of skid curvature |
40 mm |
Measuring methods |
Skidless/Skidded (switchable |
Drive unit (X axis) |
Measuring speed |
0.05, 0.1, 0.2, 0.5, 1.0 mm/s |
Drive speed |
0.5, 1, 2, 5 mm/s |
Straightness |
0.3 µm/25 mm |
0.5 µm/50 mm |
Up/down inclination unit |
Vertical travel |
10 mm |
Inclination adjustment angle |
±1.5° |
Applicable standards |
JIS 1982/JIS 1994/JIS 2001/ISO 1997/ANSI/VDA |