Model No | Standard drive unit | Retractable drive unit | Transverse tracing drive unit | |||||
SJ-210 (0.75 mN type) |
SJ-210 (4 mN type) |
SJ-210 (0.75 mN type) |
SJ-210 (4 mN type) |
SJ-210 (0.75 mN type) |
SJ-210 (4 mN type) |
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Order No. | mm | 178-560-11 | 178-560-12 | 178-562-11 | 178-562-12 | 178-564-11 | 178-564-12 | |
inch/mm | 178-561-11 | 178-561-12 | 178-563-11 | 178-563-12 | 178-565-11 | 178-565-12 | ||
Measuring range | X axis | 16.0 mm | 5.6 mm | |||||
Detector | Range | 360 µm (-200 µm to +160 µm) | ||||||
Range/Resolution | 360 µm/0.02 µm, 100 µm/0.006 µm, 25 µm/0.002 µm | |||||||
Measuring force/Stylus tip shape | Depends on the Order No.: 0.75 mN/2 µmR 60° (when the Order No. ends with “-11”) 4 mN/5 µmR 90° (when the Order No. ends with “-12”) |
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Applicable standards | JIS 1982/JIS 1994/JIS 2001/ISO 1997/ANSI/VDA | |||||||
Assessed profile | Primary profile, Roughness profile, DF profile, Roughness motif profile |