|Turntable||Rotational accuracy (JIS B 7451-1997)||Radial direction||(0.04+6H/10000) µm H:Probing height (mm)|
|Axial direction||(0.04+6X/10000) µm X: distance from the center of rotation (mm)|
|Maximum probing diameter*¹||Ø200 mm (Ø380 mm: for the vertical position when detector holder is installed reversely, the maximum probing height is up to 50 mm from the table top.|
|Maximum loading mass||25 kg|
|Vertical movement||Vertical travel||280 mm|
|X axis||Travel range||165 mm (-25 mm to 140 mm from the rotation center)|
|Detector*²||Measuring angle||±1000 µm|
*1 Auxiliary stage for a low-height workpiece (optional) is required for the measurement 20 mm or less in the radial direction from the center point of the table and 20 mm or less from the table top.
*2 Only the standard length stylus is applicable to this detector. The long type cannot be used.