Model No. | RA-1600 | ||
Turntable | Rotational accuracy (JIS B 7451-1997) | Radial direction | (0.02+6H/10000) µm H:Probing height (mm) |
Axial direction | (0.02+6X/10000) µm X: distance from the center of rotation (mm) | ||
Maximum loading mass | 25 kg | ||
Maximum probing diameter | Ø280 mm | ||
Vertical movement (Z-axis column unit) | Vertical travel | 300 mm | |
X axis | Travel range | 165 mm (-25 mm to 140 mm from the rotation center) | |
Detector* | Measuring range | Standard | ±400 µm / ±40 µm / ±4 µm |
Tracking | ±5 mm |