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| BF (Bright-field) | Without Z-axis scale | Model No. | MF-UA1010D | MF-UA2010D | MF-UA2017D | MF-UA3017D | MF-UA4020D |
| Order No. | 176-871*1 | 176-872*1 | 176-873*1 | 176-874*1 | 176-875*1 | ||
| With Z-axis scale | Model No. | MF-UB1010D | MF-UB2010D | MF-UB2017D | MF-UB3017D | MF-UB4020D | |
| Order No. | 176-876*1 | 176-877*1 | 176-878*1 | 176-879*1 | 176-880*1 | ||
| BD (Bright-field/Dark-field) | Without Z-axis scale | Model No. | MF-UC1010D | MF-UC2010D | MF-UC2017D | MF-UC3017D | MF-UC4020D |
| Order No. | 176-881*1 | 176-882*1 | 176-883*1 | 176-884*1 | 176-885*1 | ||
| With Z-axis scale | Model No. | MF-UD1010D | MF-UD2010D | MF-UD2017D | MF-UD3017D | MF-UD4020D | |
| Order No. | 176-886*1 | 176-887*1 | 176-888*1 | 176-889*1 | 176-890*1 | ||
| Observation Image | BF (Bright-field) (MF-U C and models only), Polarization, Differential Interference Contrast (DIC) Erect image | ||||||
| Eyepiece (optional) with diopter adjustment | 10X (eyepiece field number:24, two eyepieces provided as standard), 15X, 20X | ||||||
| Turret (required) | Bright-field (BF) | Manual/Motor (select either one) | |||||
| Bright-field/Dark field (BD) | |||||||
| Objective (Optional) | Bright-field (BF) | M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo Series | |||||
| Bright-field/Dark field (BD) | BD Plan Apo Series | ||||||
| Illumination unit (One of the two options must be selected) | LED illumination | Transmitted illumination: Telecentric system, Built-in aperture diaphragm, White LED light source, stepless light intensity control with cooling fan reflected illumination: Koehler illumination, Variable aperture diaphragm mechanism, White LED light source, stepless light intensity control. Control Unit: Power ON/OFF switch (main switch), AC100 to 240 V power input connector. | |||||
| Halogen illumination | Transmitted illumination: Telecentric system, Built-in aperture diaphragm, Halogen bulb (12V, 50 W), stepless light intensity control, with cooling fan. Reflected illumination: Koehler illumination, Variable aperture diaphragm mechanism 12 V, 50 W or 12 V, 150 W halogen bulb (selectable),external fiber-optic illumination, stepless light intensity control. Control unit: Power ON/OFF switch (main switch), AC100 to 240 power input connector. | ||||||
| Stage | Measuring range | 100×100 mm | 200×100 mm | 200×170 mm | 300×170 mm | 400×200 mm | |
| Quick-release mechanism | Provided as standard for the X and Y axes | ||||||
| Zero-set button | Provided as standard for the X and Y axes (and for the Z axis only for the MF-UB and -UD types) | ||||||
| Z axis | Max. workpiece height | 150 mm | 220 mm | ||||
| Feed mechanism | Coaxial coarse and fine feed, handles on both sides (coarse: 10 mm/rotation, fine:0.1 mm/rotation | ||||||
| Measuring accuracy*2 (X and Y axes, when not loaded) | (2.2+0.02L) µm L=measuring length (mm) | ||||||
| Digital display | Resolution | 1/0.5/0.1 µm 0.0001/0.00005/0.00001 in switchable | |||||
| Display axes | X and Y (or X, Y, and Z only for the MF-UB and -UD types) | ||||||
| Functions | Zero-setting, direction switching, RS-232C output, USB output (specific to QSPAK) | ||||||
*1 The following suffixes are added to the order No.to specify the User Manual’s language: -10 for English; -11 for Simplified Chinese;
No suffix for Japanese.
*2 Measuring method complies with JIS B 7153.
| Bulb replacement for transmitted/reflected illumination | Standard: Halogen bulb (12V, 50 W) (513667) |
| Bulb life: 50 hours | |
| For replacement for reflected illumination (from separate light source) | Standard: Halogen bulb (12V, 100 W) (517181) |
| High intensity bulb (12 V, 100 W) (12BAD602) |
*3 At the time of purchase, a standard bulb and a high-intensity bulb are provided. (Only for the Reflected illumination models.)
| BF (Bright-field) | Model No. | MF-UJ2017D | MF-UJ3017D | MF-UJ4020D | |
| Order No. | 176-894* | 176-895* | 176-896* | ||
| BD (Bright-field/Dark-field) | Model No. | MF-UK2017D | MF-UK4020D | MF-UK4020D | |
| Order No. | 176-897* | 176-898* | 176-899* | ||
| Eyepiece (optional) with diopter adjustment | 10X (eyepiece field number: 24, two eyepieces provided as standard), 15X, 20X | ||||
| Objective (optional) | Bright-field (BF) | M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo Series | |||
| Bright-field /dark-field (BD) | BD Plan Apo Series | ||||
| Vision AF*2 | Available | ||||
| Stage | Measuring range | 200×170 mm | 300×170 mm | 400×200 mm | |
| Quick release mechanism | Fitted to X and Y axes | ||||
| Zero set switch | Fitted to X and Y axes | ||||
| Z axis | Max. workpiece height | 220 mm | |||
| Feed mechanism | Motor drive (measuring speed: max. 20 mm/s) | ||||
| Measuring accuracy*3 (X and Y axes, when not loaded) | (2.2+0.02L) µm L=measuring length (mm) | ||||
| Digital display | Resolution | 1/0.5/0.1 µm 0.0001/0.00005/0.00001 in (switchable) | |||
| Display axes | X, Y and Z | ||||
| Functions | Zero-setting, direction switching | ||||
*1 To denote your AC power cable add the following suffixes to the order No.: A for UL /CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix is required for PSE.
*2 Vision Unit and an image AF cable are separately required.
*3 Measuring method complies with JIS B 7153.
