Model No. |
CV-2100M4 |
CV2100N4 |
Measuring range |
X axis |
100 mm |
Z1 axis (detector unit) |
50 mm |
Z2-axis (column) travel range |
350 mm |
– |
X-axis inclination angle |
±45° |
Resolution |
X axis |
0.1 µm |
Z1 axis |
0.1 µm |
Drive method |
X axis |
Motor (0 to 20 mm/s) |
Vertical travel (Z-axis column) |
Manual (Quick-vertical-motion, fine) |
– |
Measuring speed |
0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0, 5.0 mm/s |
Straightness (when the X axis is horizontal) |
2.5 µm/100 mm |
Accuracy(20°C) |
X axis |
±(2.5+0.02L) µm L=Measurement Length (mm) |
Z1 axis |
±(2.5|0.1H|)µm H=Measurement Length (mm) |
Measuring machine |
Both pulling and pushing directions |
Measuring face direction |
Downward direction |
Measuring force |
30±10 mN (3 gf) |
Traceable angle (using the standard stylus) |
Ascent 77°, Descent 87° (according to surface property) |
External dimensions (W×D×H) |
745×450×885 mm |
651×143×138.5 mm |
Mass |
145.8 kg |
5.8 kg |