| Model No. | CV-2100M4 | CV2100N4 | |||
| Measuring range | X axis | 100 mm | |||
| Z1 axis (detector unit) | 50 mm | ||||
| Z2-axis (column) travel range | 350 mm | – | |||
| X-axis inclination angle | ±45° | ||||
| Resolution | X axis | 0.1 µm | |||
| Z1 axis | 0.1 µm | ||||
| Drive method | X axis | Motor (0 to 20 mm/s) | |||
| Vertical travel (Z-axis column) | Manual (Quick-vertical-motion, fine) | – | |||
| Measuring speed | 0.02, 0.05, 0.1, 0.2, 0.5, 1.0, 2.0, 5.0 mm/s | ||||
| Straightness (when the X axis is horizontal) | 2.5 µm/100 mm | ||||
| Accuracy(20°C) | X axis | ±(2.5+0.02L) µm L=Measurement Length (mm) | |||
| Z1 axis | ±(2.5|0.1H|)µm H=Measurement Length (mm) | ||||
| Measuring machine | Both pulling and pushing directions | ||||
| Measuring face direction | Downward direction | ||||
| Measuring force | 30±10 mN (3 gf) | ||||
| Traceable angle (using the standard stylus) | Ascent 77°, Descent 87° (according to surface property) | ||||
| External dimensions (W×D×H) | 745×450×885 mm | 651×143×138.5 mm | |||
| Mass | 145.8 kg | 5.8 kg | |||